Integrated Bioscience and Nanotechnology Cleanroom

The Integrated Bioscience and Nanotechnology Cleanroom (iBioNC)at University of Georgia includes a 2,200-square-foot (Phase I) Class 100/1,000 multidisciplinary, nanotechnology-focused fabrication, characterization, and manipulation facility and a 1,000-square-foot (Phase II) Class 10,000 biocleanroom part. This campus-wide shared facility can also be accessed by users outside UGA.

A list of equipment:Lithography / Patterning Tools:

• Karl Suss MA6 Mask Aligner
• Karl Suss MJB 3 Mask Aligner
• Laser MicroMachining System
• Optical Microscope
• Spin Coater
• Hot Plate

Deposition Tools:

• Atomic Layer Deposition System
• Ink-Jet Deposition System
• PVD 75 Electron Beam Deposition System
• PVD 75 Sputtering Deposition System
• Thermal Evaporator

Etching Tools:

• Trion Phantom III RIE Etcher
• Trion Sirus T2 TableTop RIE Etcher
• Metrology Tools:
• Malvern Morphologi 4
• M-2000V Spectroscopic Ellipsometer
• Microscope System with Fast CCD Camera
• PHE101 Discrete Wavelength Ellipsometer
• Profilometer
• XGT-5000 X-ray Analytical Microscope
• Zetasizer Nano ZS Analyzer
• Carl Zeiss Axio Scope.A1 Microscopy Systems
• Model EZ7 Vibrating Sample Magnetometer (VSM)

Biology Tools:

• Bio-Hood
• CO2 Incubator
• Incubator Shaker
• Low temperature Refrigerator
• Other Processing tools:
• Plasma Cleaner
• Wire Bonder